Mélange d'attaque Oxyde tamponné (6:1), CMOS pour usage microélectronique, J.T.Baker®
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Danger
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1178-03EA
0
CHF
1178-03
Mélange d'attaque Oxyde tamponné (6:1), CMOS pour usage microélectronique, J.T.Baker®
Mélange d'attaque oxyde tamponné
In the Avantor Electronic Materials range, we have solvents, acids and bases in CMOS and Finyte/VLSI quality, as well as Performance Materials like photoresist- and residue-removers, selective etchants, BEOL and FEOL. Avantor Performance Materials portfolio of production-proven chemistries, customizable chemistry platforms and world-class applications centers are designed to help you meet your process improvement goals faster and speed up your ramp time to the next node.
ONU:
2992 ADR: 8,II |
Résultats des tests de spécification
For Microelectronic Use | |
Ship and store material above 60°F (16°C) | |
Ammonium Fluoride (NH₄F)(w/w) | 33.5 - 35.5 % |
Hydrofluoric Acid (HF)(w/w) | 7.0 - 7.3 % |
Residue after Ignition | ≤ 10 ppm |
Chloride (Cl) | ≤ 3000.0 ppb |
Nitrate (NO₃) | ≤ 3000 ppb |
Phosphate (PO₄) | ≤ 700.0 ppb |
Sulfate (SO₄) | ≤ 1500.0 ppb |
Trace Impurities - Aluminum (Al) | ≤ 50.0 ppb |
Arsenic and Antimony (as As) | ≤ 30.0 ppb |
Trace Impurities - Barium (Ba) | ≤ 10.0 ppb |
Trace Impurities - Beryllium (Be) | ≤ 10.0 ppb |
Trace Impurities - Bismuth (Bi) | ≤ 20.0 ppb |
Trace Impurities - Boron (B) | ≤ 50 ppb |
Trace Impurities - Cadmium (Cd) | ≤ 20.0 ppb |
Trace Impurities - Calcium (Ca) | ≤ 100.0 ppb |
Trace Impurities - Chromium (Cr) | ≤ 10.0 ppb |
Trace Impurities - Cobalt (Co) | ≤ 10.0 ppb |
Trace Impurities - Copper (Cu) | ≤ 10.0 ppb |
Trace Impurities - Gallium (Ga) | ≤ 10.0 ppb |
Trace Impurities - Germanium (Ge) | ≤ 40.0 ppb |
Trace Impurities - Gold (Au) | ≤ 20 ppb |
Heavy Metals (as Pb) | ≤ 1000.0 ppb |
Trace Impurities - Iron (Fe) | ≤ 50.0 ppb |
Trace Impurities - Lead (Pb) | ≤ 10.0 ppb |
Trace Impurities - Lithium (Li) | ≤ 10.0 ppb |
Trace Impurities - Magnesium (Mg) | ≤ 50.0 ppb |
Trace Impurities - Manganese (Mn) | ≤ 10.0 ppb |
Trace Impurities - Molybdenum (Mo) | ≤ 10.0 ppb |
Trace Impurities - Nickel (Ni) | ≤ 10.0 ppb |
Trace Impurities - Potassium (K) | ≤ 50 ppb |
Trace Impurities - Silver (Ag) | ≤ 50 ppb |
Trace Impurities - Sodium (Na) | ≤ 100.0 ppb |
Trace Impurities - Strontium (Sr) | ≤ 10.0 ppb |
Trace Impurities - Thallium (Tl) | ≤ 20.0 ppb |
Trace Impurities - Tin (Sn) | ≤ 20.0 ppb |
Trace Impurities - Titanium (Ti) | ≤ 100.0 ppb |
Trace Impurities - Zinc (Zn) | ≤ 100.0 ppb |
Particle Count - 0.5 µm and greater | ≤ 150 par/ml |
Particle Count - 1.0 µm and greater | ≤ 8 par/ml |
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